Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method

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Effect of CO2 Addition on Preparation of Diamond Films by Direct-Current Hot-Cathode Plasma Chemical Vapor Deposition Method

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【作者】张春梅，郑艳彬，姜志刚，吕宪义，侯雪，胡双，刘军伟
【作者单位】Department of Foundation Jilin Business and Technology College Changehun State Key Laboratory of Superhard Materials Jilin University Changehun
【年份】2010
【卷号】第27卷
【期号】第8期
【页码】232-234
【ISSN】0256-307X
【关键词】等离子体化学气相沉积法直流热阴极金刚石薄膜薄膜制备二氧化碳 CO2流量扫描电镜观察晶粒取向
【文献类型】期刊

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